Handbook of Silicon Semiconductor Metrology - Alain C. Diebold
- Title: Handbook of Silicon Semiconductor Metrology
- Author: Alain C. Diebold
- Pages: 896 pages
- Publisher: CRC; 1 edition (June 29, 2001)
- Language: English
- ISBN-10: 0824705068
- ISBN-13: 978-0824705060
Book Description
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
Download (11.4 Mb, Type: PDF)
Rapidshare.com
Password: physicsbooks.info
Related posts
Did you enjoy this post? Why not leave a comment below and continue the conversation, or subscribe to my feed and get articles like this delivered automatically to your feed reader.
Comments
No comments yet.
Leave a comment